Angle and In-line Valves
High vacuum angle and in-line valves are for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electonics production, as well as food and pharmaceutical manufacturing.
Slit Valves
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
